Brief Introduction
- Titanium target materials are made from high-purity titanium or titanium alloys. The purity of 99.9% to 99.9999%. They are a type of highly pure material, produced through the physical vapor deposition (PVD) process, and are mainly used in the sputtering coating technology.
- Titanium itself is a transition metal with excellent heat resistance and strength, which is why the target materials made from it perform well in high-temperature and high-pressure environments.
- This type of target material is mainly used in semiconductor, optical coating, decorative coating, industrial anti-corrosion and other fields, and is one of the key basic materials in high-end manufacturing.
Material Specifications and Properties
- Purity specification：
99.9% (3N): It is commonly used in fields such as decorative coatings with relatively low purity requirements and tool coatings.
≥99.99% (4N): This is the baseline for applications in fields such as new energy (like solar power).
99.995% (4N5): The typical purity of the mainstream titanium target materials used in semiconductors.
≥99.999% (5N): Mainly used for the manufacturing of high-end semiconductor devices.
≥99.9999% (6N): It is mainly used in the manufacturing of very large scale integrated circuits (VLSI) with a capacity of 16 megabits or more, and it represents the highest level of requirement.
- The shapes and sizes of titanium target materials are mainly divided into two categories. They can also be customized according to customer requirements to meet the needs of different application environment.
Cylindrical target material
Common diameter：60mm, 65mm, 95mm, 100mm(Mostly used for decoration and in the tool industry)
Common length：30mm, 32mm, 40mm, 45mm
Common specifications for wafer coating：Φ200mm (8-inch wafer), Φ300mm (12-inch wafer)
- Cylindrical target material (rotating target)
This is the mainstream choice for large-area coating, widely used in display panels and photovoltaic fields, with a higher utilization rate. The sizes are diverse and need to be customized according to the production line design.
- Material properties
Based on the requirements of high melting point and low density
With relatively high requirements for uniformity and impurity control
Application Fields
Semiconductor industry: Titanium target materials are used in semiconductor manufacturing to deposit titanium films, serving as conductive layers or barrier layers, and are widely applied in integrated circuits and microelectronic devices.
Optical Coating: Titanium targets can be used to produce high reflectivity or anti-reflection coatings, which are applied to optical lenses, display screens, and solar panels, among others.
Decorative Coating: Titanium substrates can be coated with various colors through the sputtering process, and are widely used in watches, jewelry, and home decoration fields.
Medical devices: Titanium materials are used to fabricate biocompatible coatings, which are applied to medical devices such as artificial joints and dental implants, to enhance their durability and biocompatibility.
Aerospace: Titanium materials are used to produce coatings that are resistant to high temperatures and corrosion, and are applied to aircraft engine components and the surface protection of spacecraft.
Energy sector: Titanium target materials are used in lithium-ion batteries and fuel cells to prepare electrode materials, thereby enhancing the performance and lifespan of the batteries.
Product Display
Our Company
Baoji Yibaite New Materials Technology Co., Ltd is the best manufacturer and supplier of titanium products. We have a professional research and development team and a wealth of production experience. We have got GB/T 19001-2016/ISO9001:2015 certificate and ISO 13485 certificate.
Baoji Yibaite New Materials Technology Co., Ltd offers professional titanium materials and services to you.